Yaskawa Application Overview: Texturing Etch
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Typically, a textured etching application attempts to etch small pyramid structures on the surface of the wafer. The diagram below shows how a textured silicon substrate compares with a flat one. The textured substrate allows less light to be reflected off of the surface of the substrate. It reflects more light back into the substrate. Therefore, more light is captured by the solar cells, allowing for more light to be processed into electrical energy.
An XYZ positioning application can be used to perform the textured etching onto the wafer. Yaskawa rotary or linear servomotors and servo amplifiers can be used to accomplish the texturing. Sigma-5 amplifiers perform with a 1.6 kHz frequency response. When fine tuned, they are capable of reducing settling times down to under 4ms. This allows for higher cycle times. All Sigma-5 servomotors feature a standard 20-bit absolute encoder. This provides greater positional precision and enhances repeatability, both keys for semiconductor and solar applications.